JPS58731A - 静電容量式圧力センサ - Google Patents

静電容量式圧力センサ

Info

Publication number
JPS58731A
JPS58731A JP9949881A JP9949881A JPS58731A JP S58731 A JPS58731 A JP S58731A JP 9949881 A JP9949881 A JP 9949881A JP 9949881 A JP9949881 A JP 9949881A JP S58731 A JPS58731 A JP S58731A
Authority
JP
Japan
Prior art keywords
diaphragm
pressure sensor
substrate
metal case
capsule
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9949881A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6412329B2 (en]
Inventor
Osamu Makino
治 牧野
Toru Ishida
徹 石田
Seiji Oikawa
及川　清司
Jun Yasuda
純 安田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP9949881A priority Critical patent/JPS58731A/ja
Publication of JPS58731A publication Critical patent/JPS58731A/ja
Publication of JPS6412329B2 publication Critical patent/JPS6412329B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
JP9949881A 1981-06-25 1981-06-25 静電容量式圧力センサ Granted JPS58731A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9949881A JPS58731A (ja) 1981-06-25 1981-06-25 静電容量式圧力センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9949881A JPS58731A (ja) 1981-06-25 1981-06-25 静電容量式圧力センサ

Publications (2)

Publication Number Publication Date
JPS58731A true JPS58731A (ja) 1983-01-05
JPS6412329B2 JPS6412329B2 (en]) 1989-02-28

Family

ID=14248948

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9949881A Granted JPS58731A (ja) 1981-06-25 1981-06-25 静電容量式圧力センサ

Country Status (1)

Country Link
JP (1) JPS58731A (en])

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6262944U (en]) * 1985-10-11 1987-04-18
JPS62170538U (en]) * 1986-04-18 1987-10-29
JPS6319527A (ja) * 1986-05-05 1988-01-27 テキサス　インスツルメンツ　インコ−ポレイテツド 容量性圧力トランスジュ−サを備えた圧力センサ
JPS63228038A (ja) * 1985-11-26 1988-09-22 Nippon Denso Co Ltd 半導体圧力変換器
US4896676A (en) * 1986-06-11 1990-01-30 Signal Technology Co., Ltd. Blood pressure measuring unit
JPH02190731A (ja) * 1988-12-08 1990-07-26 Texas Instr Inc <Ti> 圧力変換器の高圧パッケージ
US5561247A (en) * 1993-03-30 1996-10-01 Honda Motor Co., Ltd. Pressure sensor
JP2001133479A (ja) * 2000-09-21 2001-05-18 Mitsubishi Electric Corp 慣性力センサおよびその製造方法
WO2002018896A1 (de) * 2000-09-01 2002-03-07 Endress + Hauser Gmbh + Co. Kg Druckmesszelle
JP2007502416A (ja) * 2003-08-11 2007-02-08 アナログ デバイシーズ インク 容量型センサ
JP2010197057A (ja) * 2009-02-23 2010-09-09 Kyocera Corp 圧力検出装置用基体および圧力検出装置
WO2014086512A1 (de) * 2012-12-03 2014-06-12 Robert Bosch Gmbh Drucksensormodul

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54118283A (en) * 1978-01-23 1979-09-13 Motorola Inc Electromechanical pressure transducer

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54118283A (en) * 1978-01-23 1979-09-13 Motorola Inc Electromechanical pressure transducer

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6262944U (en]) * 1985-10-11 1987-04-18
JPS63228038A (ja) * 1985-11-26 1988-09-22 Nippon Denso Co Ltd 半導体圧力変換器
JPS62170538U (en]) * 1986-04-18 1987-10-29
JPS6319527A (ja) * 1986-05-05 1988-01-27 テキサス　インスツルメンツ　インコ−ポレイテツド 容量性圧力トランスジュ−サを備えた圧力センサ
US4896676A (en) * 1986-06-11 1990-01-30 Signal Technology Co., Ltd. Blood pressure measuring unit
JPH02190731A (ja) * 1988-12-08 1990-07-26 Texas Instr Inc <Ti> 圧力変換器の高圧パッケージ
US5561247A (en) * 1993-03-30 1996-10-01 Honda Motor Co., Ltd. Pressure sensor
WO2002018896A1 (de) * 2000-09-01 2002-03-07 Endress + Hauser Gmbh + Co. Kg Druckmesszelle
JP2001133479A (ja) * 2000-09-21 2001-05-18 Mitsubishi Electric Corp 慣性力センサおよびその製造方法
JP2007502416A (ja) * 2003-08-11 2007-02-08 アナログ デバイシーズ インク 容量型センサ
JP2010197057A (ja) * 2009-02-23 2010-09-09 Kyocera Corp 圧力検出装置用基体および圧力検出装置
WO2014086512A1 (de) * 2012-12-03 2014-06-12 Robert Bosch Gmbh Drucksensormodul
US9664579B2 (en) 2012-12-03 2017-05-30 Robert Bosch Gmbh Pressure sensor module

Also Published As

Publication number Publication date
JPS6412329B2 (en]) 1989-02-28

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